The Applied DuraPad CMP polishing pad for 200mm CMP systems lasts more than 30% longer than existing pads. The pads feature high reproducibility due to continuous sheet cross-linking and curing. The DuraPad is made using a patented inert gas foaming process that optimizes the pad pore structure for reduced defects and lower slurry flow requirements.

Applied Materials Inc. www.appliedmaterials.com